Work

Oxygen atom density in capacitively coupled RF oxygen plasma

Year: 2008

Type: article

Source: Vacuum

DOI: 10.1016/j.vacuum.2008.07.008

Authors: Tjasa Vrlinic, Caroline Mille, Dominique Debarnot, Fabienne Poncin-Epaillard

Institutions: Centre National de la Recherche Scientifique, Jožef Stefan Institute, Le Mans Université

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2092425145

FWCI: 1.094

Cites: 56

Cited by: 21

Related to: 10