Work

Multilayer titanium nitride and silicide structures synthesized by multipulse excimer laser irradiation

Year: 1992

Type: article

Source: Applied Surface Science

DOI: 10.1016/0169-4332(92)90070-e

Authors: E. D'Anna, G. Leggieri, A. Luches, M. Martino, A. Perrone, P. Mengucci, I.N. Mihailescu

Institutions: University of Salento, Institutul de Fizică Atomică

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2093524596

FWCI: 1.569

Cites: 9

Cited by: 21

Related to: 10