Nanoindentation hardness, abrasive wear, and microstructure of TiN/NbN polycrystalline nanostructured multilayer films grown by reactive magnetron sputtering
Year: 1998
Type: article
DOI: 10.1116/1.581466
Authors: H. Ljungcrantz, C. Engström, L. Hultman, M. Olsson, X. Chu, M. S. Wong, W. D. Sproul
Institutions: Linköping University, Uppsala University, Northwestern University
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2093802420