Work

On-Chip Mechanical Characterization using an Electro-thermo-mechanical Actuator

Year: 2009

Type: article

Source: Experimental Mechanics

DOI: 10.1007/s11340-009-9266-1

Authors: A. Corigliano, L. Domenella, G. Langfelder

Institution: Politecnico di Milano

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2094090969

FWCI: 0.773

Cites: 24

Cited by: 16

Related to: 10