Work

Piezoresistive Properties of Polycrystalline Silicon Thin Film

Year: 1972

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.11.20

Authors: Yoshiharu Onuma, Kunihiko Sekiya

Institution: Shinshu University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2094540673

FWCI: 1.379

Cites: 4

Cited by: 34

Related to: 10