The determination of film hardness from the composite response of film and substrate to nanometer scale indentations
Year: 1992
Type: article
Authors: B.D. Fabes, W.C. Oliver, R.A. McKee, F.J. Walker
Institutions: University of Arizona, Oak Ridge National Laboratory
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2094670535