Work

Ion Implantation Depth Distributions: Energy Deposition Into Atomic Processes and Ion Locations

Year: 1970

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.1653112

Author: David K. Brice

Institution: Sandia National Laboratories

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2095263264

FWCI: 22.21

Cites: 6

Cited by: 66

Related to: 10