Work

Ion beam induced composition changes during auger sputter profiling of thin Al films on InP

Year: 1983

Type: article

Source: Surface and Interface Analysis

DOI: 10.1002/sia.740050109

Authors: D. K. Skinner, J. G. Swanson, C. V. Haynes

Institution: University of London

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2096478660

FWCI: 0.925

Cites: 17

Cited by: 15

Related to: 10