Low Temperature Fabrication of (Ba, Sr)TiO3 Thin Films by ECR Plasma CVD
Year: 1996
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-433-3
Authors: Y. Kato, H. Yabuta, S. Sone, H. Yamaguchi, T. Iizuka, S. Yamamichi, P-Y. Lesaicherre, S. Nishimoto, M. Yoshida
Institution: NEC (Japan)
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2096847423