Work

Controlled glow to arc transition in sputtering for high rate deposition of carbon films

Year: 2010

Type: article

Source: Diamond and Related Materials

DOI: 10.1016/j.diamond.2010.11.007

Authors: M. Lattemann, B. Abendroth, A. Moafi, D.G. McCulloch, D.R. McKenzie

Institutions: Karlsruhe Institute of Technology, The University of Sydney, Technische Universität Darmstadt, TU Bergakademie Freiberg, RMIT University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Australian Research Council

OpenAlex ID: W2101936680

FWCI: 3.253

Cites: 30

Cited by: 49

Related to: 10