Work

KrF excimer laser micromachining of MEMS materials: characterization and applications

Year: 2011

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/22/1/015012

Authors: Kewei Liu, Zhorro NiCkolov, Jonghyun Oh, Hongseok “Moses” Noh

Institution: Drexel University

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, National Institute of Neurological Disorders and Stroke

OpenAlex ID: W2102162121

FWCI: 4.985

Cites: 18

Cited by: 29

Related to: 10