Fabrication of silicon vertical taper structures using KOH anisotropic etching
Year: 2006
Type: article
Source: Microelectronic Engineering
Authors: Roman Holly, Kurt Hingerl
Institution: Johannes Kepler University of Linz
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2103971664