Work

Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range

Year: 2015

Type: article

Abstract: We present state-of-the-art high resolution transmission gratings, applicable for spectroscopy in the vacuum ultraviolet (VUV) and the soft X-ray (SRX) wavelength range, fabricated with a novel process using ultraviolet based nano imprint lithography (UV-NIL). Free-standing, high-line-density gratings with up to 10,000 lines per mm and various space-to-period ratios were fabricated. An optical characterization of the gratings was carried out in the range from 17 to 34 nm wavelength using high-harmonic generation in a capillary waveguide filled with Ne, and around 13.5 nm wavelength (from 10 to 17 nm) using a Xenon discharge plasma.

Source: Optics Express

DOI: 10.1364/oe.23.004421

Authors: S.J. Goh, H.J.M. Bastiaens, B Vratzov, Q. Huang, F. Bijkerk, K.J. Boller

Institution: University of Twente

Language: English

Topic: Advanced X-ray Imaging Techniques

Subfield: Radiation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

Funders: Stichting voor Fundamenteel Onderzoek der Materie, Nederlandse Organisatie voor Wetenschappelijk Onderzoek, Stichting voor de Technische Wetenschappen