Silane injection in a high-density low-pressure plasma system and its influence on the deposition kinetics and material properties of SiO2
Year: 2008
Type: article
DOI: 10.1116/1.2949234
Authors: R. Botha, B. Haj Ibrahim, P. Bulkin, B. Drévillon
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2106744556