High-Performance Condenser Microphone With Single-Crystalline Silicon Diaphragm and Backplate
Year: 2007
Type: article
Source: IEEE Sensors Journal
Institutions: Japan Broadcasting Corporation (Japan), Panasonic (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: University of Tokyo
OpenAlex ID: W2106782857