Work

Air Cushion Press for Excellent Uniformity, High Yield, and Fast Nanoimprint Across a 100 mm Field

Year: 2006

Type: article

Source: Nano Letters

DOI: 10.1021/nl0615118

Authors: He Gao, Hua Tan, Wei Zhang, Keith Morton, Stephen Y. Chou

Institution: Princeton University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2107124341

FWCI: 5.079

Cites: 11

Cited by: 100

Related to: 10