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APCVD of ZnO:Al, insight and control by modeling
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Year:
2013
Type:
article
Source:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.06.055
Authors:
J. van Deelen,
A. Illiberi,
B. Kniknie,
H. Steijvers,
A. Lankhorst,
P. Simons
show all 6
Institution:
Netherlands Organisation for Applied Scientific Research
Language:
English
Topic:
ZnO doping and properties
Subfield:
Materials Chemistry
Field:
Materials Science
Domain:
Physical Sciences
Open Access status:
bronze
OpenAlex ID:
W2107380265
FWCI:
0.534
Cites:
29
Cited by:
17
Related to:
10