Work

Thermally-induced stresses in thin aluminum layers grown on silicon

Year: 2004

Type: article

Source: Powder Diffraction

DOI: 10.1154/1.1649326

Authors: E. Eiper, R. Resel, C. Eisenmenger-Sittner, M. Hafok, J. Keckes

Institutions: Austrian Academy of Sciences, Montanuniversität Leoben, Graz University of Technology, Erich Schmid Institute of Materials Science, TU Wien, Materials Center Leoben (Austria)

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2108014642

FWCI: 1.427

Cites: 13

Cited by: 17

Related to: 10