Work

Laser Ultrasonic Instrumentation for Accurate Temperature Measurement of Silicon Wafers in Rapid Thermal Processing Systems

Year: 1998

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-525-135

Authors: Dan Klimek, Brian Anthonyt, Agostino Abbate, Petros Kotidis

Institutions: Textron (United States), Massachusetts Institute of Technology

Language: English

Topic: Ultrasonics and Acoustic Wave Propagation

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2108872166

FWCI: 0.632

Cites: 9

Cited by: 8

Related to: 10