Techniques for filtering graphite macroparticles in the cathodic vacuum arc deposition of tetrahedral amorphous carbon films
Year: 1999
Type: article
Source: Diamond and Related Materials
Authors: M. Hakovirta, V.-M. Tiainen, P. Pekko
Institutions: University of Helsinki, Los Alamos National Laboratory
Language: English
Topic: Vacuum and Plasma Arcs
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2109944640