Work

Cracking and delamination of metal organic vapour and deposited alumina and silica films

Year: 1993

Type: article

Source: Materials Science and Engineering A

DOI: 10.1016/0921-5093(93)90352-f

Authors: V.A.C. Haanappel, H.D. van Corbach, T. Fransen, P.J. Gellings

Institution: University of Twente

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funder: University of Twente

OpenAlex ID: W2113409122

FWCI: 4.204

Cites: 17

Cited by: 21

Related to: 10