Work

EUV spectroscopy on pulsed plasmas

Year: 2008

Type: conference-paper

Source: TU/e Research Portal

Authors: Gessel, van, A.F.H., Nijdam, S.; id_orcid 0000-0002-1310-6942, de Regt, R.J.L.J., Veldhuizen, van, E.M., Kroesen, G.M.W.

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2114809804

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