Work

Defect Reduction of Cvd-Grown Cubic SiC Epitaxial Films on Off-Axis Si(100) Substrates with a Novel Off-Direction.

Year: 1990

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-198-559

Authors: Katsuki Furukawa, Yoshihisa Fujii, Akira Suzuki, Shigeo Nakajima

Institution: Sharp Corporation (Japan)

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2115211432

FWCI:

Cites: 16

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Related to: 10