Work

Aerosol‐Assisted CVD of SnO2 Thin Films for Gas‐Sensor Applications

Year: 2011

Type: article

Abstract: In this article is a report of SnO2 deposition by aerosol‐assisted (AA)CVD from tin complexes, [Sn(18‐Cr‐6)Cl4] and [Sn(H2O)2Cl4](18‐Cr‐6). The structure and properties of the precursors, used to synthesize SnO2 layers by AACVD for the first time, are characterized with the help of X‐ray diffraction (XRD), infrared (IR), and thermogravimetric analysis (TGA). Each complex is deposited by AACVD at 250, 400, and 500 °C in a flow of N2. The resulting films are studied by XRD and atomic force microscopy (AFM). Gas‐sensing properties of the deposited layers are tested to 10 ppm NO2 in air. The maximum sensor response to the analyte is measured at 300 °C.

Source: Chemical Vapor Deposition

DOI: 10.1002/cvde.201106917

Authors: Toni T. Stoycheva, Stella Vallejos, Roman G. Pavelko, Viktor S. Popov, Vladimir G. Sevastyanov, Xavier Correig

Institutions: Universitat Rovira i Virgili, University College London, Russian Academy of Sciences, NS Kurnakova Institute of General and Inorganic Chemistry

Language: English

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2115246282

FWCI: 1.314

Cites: 43

Cited by: 26

Related to: 10