Work

Nano-Motion Stage for High-Speed and Precision Positioning on an X-Y Plane

Year: 2009

Type: article

Source: IEEE Transactions on Magnetics

DOI: 10.1109/tmag.2009.2029411

Authors: Shigeki Mori, Yuudai Sato, Akira Sakurada, Akihiro Naganawa, Yotsugi Shibuya, Goro Obinata

Institutions: Akita Industrial Technology Center, Akita University, Nagoya University

Language: English

Topic: Piezoelectric Actuators and Control

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2121174635

FWCI: 1.377

Cites: 5

Cited by: 6

Related to: 10