Work

Individual nanowire handling for NEMS fabrication

Year: 2012

Type: conference-paper

Source: IEEE/ASME International Conference on Advanced Intelligent Mechatronics

DOI: 10.1109/aim.2012.6266052

Authors: Malte Bartenwerfer, Sergej Fatikow, Hongjiang Zeng, Tie Li, Yuelin Wang

Institutions: Carl von Ossietzky Universität Oldenburg, Chinese Academy of Sciences, State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2121364458

FWCI: 2.041

Cites: 19

Cited by: 6

Related to: 10