Work

Deposition of thin and uniform photoresist on three-dimensional structures using fast flow in spray coating

Year: 2005

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/15/12/016

Authors: Vijay Kumar Singh, Minoru Sasaki, Kazuhiro Hane, Yoshihiko Watanabe, Hirosuke Takamatsu, Masato Kawakita, Hiroki Hayashi

Institutions: Tohoku University, Ushio (Japan)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2122072014

FWCI: 1.515

Cites: 24

Cited by: 33

Related to: 10