Work

Micromechanical optical spectral devices with electrostatic control

Year: 2009

Type: conference-paper

Source: International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies (INTERNANO)

DOI: 10.1109/internano.2009.5335622

Authors: Dmitry M. Nikulin, Vladimir V. Chesnokov, Dmitry V. Chesnokov

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2122575321

FWCI:

Cites:

Cited by:

Related to: 10