Work

Low Stress, High Reflectivity Thin Films for MEMS Mirrors

Year: 2002

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-729-u3.11

Authors: Yoosuf N. Picard, David P. Adams, Olga B. Spahn, Steven M. Yalisove, Daryl J. Dagel, Joseph Sobczak

Institutions: University of Michigan, Sandia National Laboratories

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: U.S. Department of Energy, Army Research Office, Sandia National Laboratories

OpenAlex ID: W2123501992

FWCI:

Cites: 4

Cited by: 7

Related to: 10