Work

Copper electrodeposition for 3D integration

Year: 2008
Type: conference-paper
Abstract: Two dimensional (2D) integration has been the traditional approach for IC integration. Increasing demands for providing electronic devices with superior performance and functionality in more efficient and compact packages has driven the semiconductor industry to develop more advanced packaging technologies.
Language: English
Open Access status: green
OpenAlex ID: W2127665200
FWCI: 5.213
Cites: 3
Cited by: 31
Related to: 10