Work

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

Year: 2011

Type: article

Source: Plasma Sources Science and Technology

DOI: 10.1088/0963-0252/20/1/015017

Authors: J Schulze, E Schüngel, Z Donkó, U Czarnetzki

Institutions: Institute for Solid State Physics and Optics, Hungarian Academy of Sciences, Ruhr University Bochum

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Hungarian Scientific Research Fund

OpenAlex ID: W2128686018

FWCI: 6.285

Cites: 56

Cited by: 135

Related to: 10