Work

Design, Fabrication, and Characterization of Thermally Actuated Probe Arrays for Dip Pen Nanolithography

Year: 2004

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2004.828738

Authors: D. Bullen, X. Wang, J. Zou, S.-W. Chung, C.A. Mirkin, C. Liu

Institutions: University of Illinois Urbana-Champaign, University of Illinois System, Northwestern University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Northwestern University

OpenAlex ID: W2129017490

FWCI: 5.801

Cites: 32

Cited by: 52

Related to: 10