Work

Synthesis of sub-micron diamond films on Si(100) for thermal applications by BEN-MPCVD

Year: 2006

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-0956-j08-02

Authors: Samuel Saada, Jean-Charles Arnault, Licinio Rocha, Philippe Bergonzo

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire d'Intégration des Systèmes et des Technologies, CEA Paris-Saclay

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2129056553

FWCI: 0.384

Cites: 9

Cited by: 4

Related to: 10