Work

Fabrication of Micromechanical Tunneling Probes and Actuators on a Silicon Chip

Year: 1999

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.38.7185

Authors: Hiroshi Toshiyoshi, Masahide Goto, Makoto Mita, Hiroyuki Fujita, Dai Kobayashi, Gen Hashiguchi, Junji Endo, Yasuo Wada

Institutions: Institute of Industrial Science, The University of Tokyo, The University of Tokyo, Tokyo Denki University, Kagawa University, Hitachi (Japan)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Deutsche Forschungsgemeinschaft, Leibniz-Gemeinschaft

OpenAlex ID: W2129492276

FWCI: 0.428

Cites: 10

Cited by: 13

Related to: 10