Work

Micromachined Bulk Wave Acoustic Bandgap Devices

Year: 2007

Type: conference-paper

Abstract: A MEMS bulk wave acoustic bandgap has been designed and experimentally verified. The acoustic bandgaps are realized by including tungsten (W) scatterers in a SiO2matrix. Wide frequency ranges where acoustic waves are forbidden to exist are formed due to the large density and acoustic impedance mismatch between W and SiO2. The acoustic bandgap structures are fabricated in a 7-mask process that features integrated aluminum nitride piezoelectric couplers. Acoustic bandgaps in a square lattice have been measured at 33 and 67 MHz with up to 35 dB of acoustic rejection and bandwidths exceeding 35% of the midgap.

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/sensor.2007.4300132

Authors: Roy H. Olsson, James G. Fleming, Ihab F. El-Kady, Melanie R. Tuck, Frederick B. McCormick

Institution: Sandia National Laboratories

Language: English

Topic: Acoustic Wave Phenomena Research

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: National Nuclear Security Administration, Laboratory Directed Research and Development, Sandia National Laboratories

OpenAlex ID: W2129721428

FWCI: 6.123

Cites: 6

Cited by: 20

Related to: 10