Work

Sensitivity analysis of plating conditions on mechanical properties of thin film for MEMS applications

Year: 2011

Type: article

Source: Journal of Mechanical Science and Technology

DOI: 10.1007/s12206-011-0205-6

Authors: Yoonhwan Woo, Sang-Hyun Kim

Institution: Hansung University

Language: English

Topic: Electrodeposition and Electroless Coatings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2133569901

FWCI: 1.624

Cites: 20

Cited by: 24

Related to: 10