Work

Fabrication of functional structures on thin silicon nitride membranes

Year: 2003

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/s0167-9317(03)00098-4

Authors: P. Ekkels, R.W. Tjerkstra, G.J.M Krijnen, J.W. Berenschot, J. Brugger, M.C. Elwenspoek

Institutions: University of Twente, École Polytechnique Fédérale de Lausanne

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funder: European Commission

OpenAlex ID: W2134458759

FWCI: 0.662

Cites: 7

Cited by: 12

Related to: 10