Work

Characterization and process effects of HfO2 thin films grown by metal-organic molecular beam epitaxy

Year: 2005

Type: article

Source: Materials Science and Engineering B

DOI: 10.1016/j.mseb.2005.06.012

Authors: Myoung-Seok Kim, Young-Don Ko, Minseong Yun, Jang-Hyuk Hong, Min-Chang Jeong, Jae-Min Myoung, Ilgu Yun

Institution: Yonsei University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2135129683

FWCI: 1.844

Cites: 28

Cited by: 53

Related to: 10