Work

Maximum Permissible EB Acceleration Voltage for SEM-Based Inspection Before Electrical Characterization of Advanced MOS

Year: 2007

Type: conference-paper

Source: IEEE International Reliability Physics Symposium proceedings

DOI: 10.1109/relphy.2007.369979

Authors: Takayuki Mizuno, Miho Takahashi, Yoshie Azuma, Hiroshi Yanagita, Kyoichiro Asayama, Koji Nakamae

Institution: Renesas Electronics (Japan)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2136138410

FWCI: 1.512

Cites: 4

Cited by: 10

Related to: 10