Effect of exposure dose on the replication fidelity and profile of very high aspect ratio microchannels in SU-8
Year: 2004
Type: article
Source: Lab on a Chip
DOI: 10.1039/b403304c
Authors: Jun Zhang, Mary B. Chan-Park, Samuel R. Conner
Institution: Nanyang Technological University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Nanyang Technological University
OpenAlex ID: W2136342882