Work

Investigations of artificial nanostructures and lithography techniques with a scanning probe microscope

Year: 1993

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.586643

Authors: U. A. Griesinger, C. Kaden, N. Lichtenstein, J. Hommel, G. Lehr, R. Bergmann, A. Menschig, H. Schweizer, H. Hillmer, H. W. P. Koops, J. Kretz, M. Rudolph

Institutions: University of Stuttgart, Deutsche Bundespost, Technische Universität Darmstadt

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Deutsche Forschungsgemeinschaft

OpenAlex ID: W2136351507

FWCI: 0.812

Cites:

Cited by: 9

Related to: 10