Work

Control of reactive sputtering process using two reactive gases

Year: 2003

Type: article

Authors: W.D. Sproul, D.J. Christie, D C Carter, S. Berg, Tomas Nyberg

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2137449779

FWCI: 0.331

Cites: 9

Cited by: 6

Related to: 10