Work

On the Ni–Si phase transformation with/without native oxide

Year: 2000

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/s0167-9317(99)00521-3

Authors: P.S. Lee, D. Mangelinck, K.L. Pey, J. Ding, J.Y. Dai, C.S. Ho, A. See

Institutions: National University of Singapore, Institute of Materials Research and Engineering

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National University of Singapore

OpenAlex ID: W2139057991

FWCI: 1.554

Cites: 31

Cited by: 53

Related to: 10