A novel fabrication technology for smooth 3D inclined polymer microstructures with adjustable angles
Year: 2004
Type: conference-paper
Authors: Kuo-Yung Hung, Heng-Tsang Hu, Fan-Gang Tseng
Institution: National Tsing Hua University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2139088944