Work

Dipole Moment Model Explaining nFET Vt Tuning Utilizing La, Sc, Er, and Sr Doped HfSiON Dielectrics

Year: 2007

Type: conference-paper

Source: Symposium on VLSI Technology

DOI: 10.1109/vlsit.2007.4339730

Authors: P. Sivasubramani, T. S. Boscke, J. Huang, C. D. Young, P. D. Kirsch, S. A. Krishnan, M. A. Quevedo-Lopez, S. Govindarajan, B. S. Ju, H. R. Harris, D. J. Lichtenwalner, J. S. Jur, A. I. Kingon, J. Kim, B. E. Gnade, R. M. Wallace, G. Bersuker, B. H. Lee, R. Jammy

Institutions: IBM (United States), North Carolina State University, The University of Texas at Dallas

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2139096489

FWCI: 14.56

Cites:

Cited by: 66

Related to: 10