Work

Alignment issues in photonic crystal device fabrication

Year: 2004

Type: conference-paper

Abstract: An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D "woodpile" structure.

Source: International Conference on Transparent Optical Networks

DOI: 10.1109/icton.2004.1360289

Authors: R.M. de Ridder, C.G. Bostan, F.J. van Soest, V.J. Gadgil

Institution: University of Twente

Language: English

Topic: Photonic Crystals and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2139097252

FWCI:

Cites: 19

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Related to: 10