Work

Development of a metrological scanning probe microscope incorporating a quartz tuning fork sensor and heterodyne laser interferometry

Year: 2012

Type: conference-paper

Source: IEEE International Instrumentation and Measurement Technology Conference

DOI: 10.1109/i2mtc.2012.6229548

Authors: Jan Herrmann, Bakir Babic, Chris Freund, Malcolm Gray, Magnus Hsu, Terry McRae

Institution: National Measurement Institute

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2139388170

FWCI: 0.988

Cites: 16

Cited by: 1

Related to: 10