Pitch fragmentation induced odd/even effects in a 36 nm floating gate NAND technology
Year: 2008
Type: conference-paper
Authors: M. F. Beug, S. Parascandola, T. Hoehr, T. Muller, R. Reichelt, L. Muller-Meskamp, P. Geiser, T. Geppert, L. Bach, U. Bewersdorff-Sarlette, O. Kenny, S. Brandl, T. Marschner, S. Meyer, S. Riedel, M. Specht, D. Manger, R. Knofler, K. Knobloch, P. Kratzert, C. Ludwig, K.-H. Kusters
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2139553292