Work

Synthesis and Evaluation of Pure-Silica-Zeolite BEA as Low Dielectric Constant Material for Microprocessors

Year: 2003

Type: article

Source: Industrial & Engineering Chemistry Research

DOI: 10.1021/ie034062k

Authors: Anupam Mitra, Cao, Wang, Wang, Limin Huang, Shuang Li, Li, Yan

Institution: University of California, Riverside

Language: English

Topic: Zeolite Catalysis and Synthesis

Subfield: Inorganic Chemistry

Field: Chemistry

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2143691981

FWCI: 0.222

Cites: 26

Cited by: 68

Related to: 10