Work

Microelectromechanical VOA design for high shock-tolerance and low temperature-dependence

Year: 2004

Type: conference-paper

Source: IEEE/LEOS International Conference on Optical MEMS

DOI: 10.1109/omems.2003.1233492

Authors: K. Isamoto, K. Kato, A. Morosawa, Changho Chong, H. Fujita, H. Toshiyoshi

Institutions: Santec Corporation (Japan), Institute of Industrial Science, The University of Tokyo, The University of Tokyo

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2145018113

FWCI: 1.66

Cites: 6

Cited by: 6

Related to: 10